Compressed Gas

6500 Series: 316L Stainless Steel Tied Diaphragm Valves

  • Designed specifically for high integrity gas applications.
  • Constructed of 316L SS with electropolishing to achieve surface finish < 10 Ra.
  • Reduced internal volume and superb leak tightness exceed the strict parameters of the semiconductor industry.
  • Mechanically linked non-perforated diaphragms with patented travel control feature assures extended cycle life.
  • Available with unitized pressure relief device having fuse-metal backed or unbacked rupture disc.
  • Clean room assembled.

 
6500 SERIES - 316L SS TIED DIAPHRAGM VALVES
Valve Series Inlet Thread Size PRD
6500 Series (Pneumatic) 25T None
6500 ARM Series (Pneumatic) 3/4" - 14NGT CG-4
6500 ARS Series (Pneumatic) 3/4" - 14NGT CG-1
6501 DR Series 1/2" - 14NGT None
6501 R Series 3/4" - 14NGT None
6501 RS Series 3/4" - 14NGT CG-1
6501 RSM Series 3/4" - 14NGT CG-4
6501 RSW Series 3/4" - 14NGT CG-5
  • For more information on available valve configurations, please contact factory or your local Sherwood distributor.